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All issues Volume 4 / No 3 (2013) Int. J. Metrol. Qual. Eng., 4 3 (2013) 209-214 References
Open Access
Issue
Int. J. Metrol. Qual. Eng.
Volume 4, Number 3, 2013
Page(s) 209 - 214
DOI https://doi.org/10.1051/ijmqe/2013059
Published online 06 March 2014
  1. X. Pang, D. Fan, X. Teng, J. Peng, Realization of digital airborne opto-electronic servo-system, Opto-Electron. Eng. 34, 10–36 (2007) [Google Scholar]
  2. W. Zhang, D. Fan, Z. Zhang, K. Li, Research on application of MEMS gyro to servo system for E-O stabilization and tracking devices, Opt. Precis. Eng. 14, 689–696 (2006) [Google Scholar]
  3. J. Yang, G. Yuan, L. Xu, The research of testing and calibration technology based on micro-mechanical gyro, Chin. J. Sens. Actuat. 19, 2264–2267 (2006) [Google Scholar]
  4. J. Fang, J. Li, W. Sheng, Improved temperature errormodel of silicon MEMS gyroscopewith inside frame driving, J. Beijing University of Aeronautics and Astronautics 32, 1277–1303 (2006) [Google Scholar]
  5. U.A. Dauderstadt, P.M. Sarro, P.J. French, Temperature dependence and drift of a thermal accelerometer, International Conference on Solid Sensors and Actuators, Chicago, USA, 1997, pp. 1209–1212 [Google Scholar]
  6. V. Annovazzi-Lodi, Mechanical-thermal noise in micro-machined gyros, Microelectron. J. 30, 1227–1230 (1999) [CrossRef] [Google Scholar]
  7. H. Man, D. Xiao, X. Wu, Z. Chen, Z. Hou, Research on temperature characteristic of mode frequency of silicon micro-gyroscope, Chin. J. Sens. Actuat. 22, 1117–1121 (2009) [Google Scholar]
  8. G. Xia, S. Wang, B. Yang, Research and test on silicon micro-gyroscope temperature characteristics, Meas. Control Technol. 28, 9–13 (2009) [Google Scholar]
  9. S. Gao, H. Liu, Micro electro mechanical system mechanics (National Defence Industrial Press, Beijing, 2008) [Google Scholar]
  10. X. Li, T. Ono, Y. Wang, M. Esashi, Study on ultra-thin NEMS cantilevers-high yield fabrication and size effect on young’s modulus of silicon, The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, USA, 2002, pp. 427–430 [Google Scholar]
  11. Y. Tan, H. Yu, Q. Huang, T. Liu, Effect of temperature on the young’s modulus of silicon nano-films, Chin. J. Electron Devices 30, 755–758 (2007) [Google Scholar]
  12. H. Chen, R. Zhang, B. Zhou, Z. Chen, Research on thermal characteristic and compensation algorithmfor MEMS gyroscope, J. Transducer Technol. 23, 24–26 (2004) [Google Scholar]
  13. B. Luo, W. Yin, M. Jiang, M. Wu, Temperature grads modelling of zero bias for micro mechanical gyroscope, Electron. Opt. Control 15, 29–31 (2008) [Google Scholar]

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