Open Access
Int. J. Metrol. Qual. Eng.
Volume 1, Number 2, 2010
Page(s) 83 - 88
Published online 17 December 2010
  1. International Technology Roadmap for Semiconductors (ITRS), Executive Summary, (2009)
  2. ITRS 2008 update,
  3. L. Jiang, M. Feldman, Portable coordinate measuring tool, J. Vac. Sci. Technol. B 23, 3056–3060 (2005) [CrossRef]
  4. L. Jiang, M. Feldman, Technique for separately viewing multiple levels, J. Vac. Sci. Technol. B 22, 3405–3408 (2004) [CrossRef]
  5. Coumarin dye number 314, Sigma-Aldrich Corporation, 3050 Spruce St., Saint Louis, MO 63103-2530
  6. P.T. Konkola, C.G. Chen, R.K. Heilmann, C. Joo, J.C. Montoya, C.-H. Chang, M.L. Schattenburg, Nanometer-level repeatable metrology using the Nanoruler, J. Vac. Sci. Technol. B. 21, 3097–3131 (2003) [CrossRef]
  7. M.L. Schattenburg, C. Chen, P.N. Everett, J. Ferrera, P. Konkola, H.I. Smith, Sub-100 nm metrology using interferometrically produced fiducials, J. Vac. Sci. Technol. B 17, 2692–2697 (1999) [CrossRef]
  8. [Opti 415/515: Measurement of focal length and distortion by W.P. Kuhn] retrieved on 8 Sept. 2010
  9. Holographic diffraction grating film catalog number R40-267, Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, NJ 08007-1380
  10. Microscope model BX60, with objective model UPlanFl 1.30 NA, Olympus America Inc., 2 Corporate Center Drive Melville, NY 11747
  11. INTELLICAM v2.05 software, Matrox Electronic Systems Ltd, boul. St-Régi Dorval, Québec, Canada H9P 2T4
  12. L. Jiang, M. Feldman, A prototype optical encoder system with nanometer measurement capability, J. Mod. Optic. (2010) (in press)
  13. Interference filter catalog number R46-156 and R46-159, Edmund Industrial Optics, 101 East Gloucester Pike, Barrington, NJ 08007-1380
  14., retrieved on 8 Sept. 2010
  15., [Common optical defects in lens systems (aberrations), Olympus Microscopy Resource Center] retrieved on 10 Sept. 2010
  16. J.R. Meyer-Arendt, Introduction to classical and modern optics, 4th edn. (Prentice Hall, Upper Saddle River, New Jersey, 1995)

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