Open Access

Table 2

Calibration history of a reference sphere's diameter.

Date 17.05.2004 26.02.2007 16.06.2009 14.06.2011 13.06.2013
d in mm 14.917 90 14.917 90 14.918 00 14.917 94 14.917 99
u in μm 0.11 0.11 0.11 0.10 0.10
Date 23.06.2015 28.07.2017 26.07.2019 21.07.2021  
d in mm 14.917 90 14.917 96 14.917 88 14.917 99  
u in μm 0.10 0.10 0.10 0.10  

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