Uncertainty-based determination of recalibration dates | International Journal of Metrology and Quality Engineering (IJMQE)

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Table 1

Measurement uncertainty budget with u_T(l_s)=15 nm to achieve < 400 nm².

i	x_i		u(x_i)	\|c_i\| ⋅ u (x_i)
1	h	1	11 nm	11 nm	121 nm²
2	a_s	0	–	0	121 nm
3	θ	0	–	0	121 nm²
4	Δa	−l_sθ	0.8 × 10^–6 K^–1	4 nm	137 nm²
5	Δθ	−l_sa_a	0.05 K	6 nm	173 nm²
6	i_s	1	15 nm	15 nm	398 nm²

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