| Issue |
Int. J. Metrol. Qual. Eng.
Volume 8, 2017
|
|
|---|---|---|
| Article Number | 26 | |
| Number of page(s) | 7 | |
| DOI | https://doi.org/10.1051/ijmqe/2017020 | |
| Published online | 23 October 2017 | |
Research Article
A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa
LNE-LCM,
1 rue Gaston Boissier,
75015
Paris, France
* Corresponding author: frederic.boineau@lne.fr
Received:
11
July
2017
Received in final form:
20
September
2017
Accepted:
28
September
2017
We describe a calibration device for absolute pressure ranging from 5 kPa to 130 kPa whose relative uncertainty contribution (k = 1), including stability, repeatability and linearity is better than 1 Pa. The device is composed of a capacitance diaphragm gauge (CDG) and a resonant silicon gauge (RSG). The good long-term stability of the calibration slope of the RSG disseminated to the CDG which in turn allows one to master the offset of the RSG, is the reason for such a low uncertainty contribution. The metrological characterisation of this working standard is presented.
Key words: absolute pressure / calibration / working standard / capacitance diaphragm gauge / resonant silicon gauge
© F. Boineau et al., published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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