Int. J. Metrol. Qual. Eng.
Volume 8, 2017
|Number of page(s)||7|
|Published online||23 October 2017|
A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa
1 rue Gaston Boissier,
* Corresponding author: email@example.com
Received in final form: 20 September 2017
Accepted: 28 September 2017
We describe a calibration device for absolute pressure ranging from 5 kPa to 130 kPa whose relative uncertainty contribution (k = 1), including stability, repeatability and linearity is better than 1 Pa. The device is composed of a capacitance diaphragm gauge (CDG) and a resonant silicon gauge (RSG). The good long-term stability of the calibration slope of the RSG disseminated to the CDG which in turn allows one to master the offset of the RSG, is the reason for such a low uncertainty contribution. The metrological characterisation of this working standard is presented.
Key words: absolute pressure / calibration / working standard / capacitance diaphragm gauge / resonant silicon gauge
© F. Boineau et al., published by EDP Sciences, 2017
This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.