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Cited article:

Combined D-optimal design and generalized regression neural network for modeling of plasma etching rate

Hailong You, Yong Chen, Peng Liu, Xinzhang Jia

Int. J. Metrol. Qual. Eng., 5 1 (2014) 105

Published online: 2014-09-22

DOI: https://doi.org/10.1051/ijmqe/2014005

This article has been cited by the following article(s):

Improvement of prediction models for dry etching characteristics by introducing plasma parameters as explanatory variables

Yasuhiro Nojiri, Kenta Tanaka, Takumi Shimosuki, Moe Kaneko and Hisataka Hayashi
Japanese Journal of Applied Physics 64 (11) 116505 (2025)
https://doi.org/10.35848/1347-4065/ae15d0