Open Access
Int. J. Metrol. Qual. Eng.
Volume 5, Number 1, 2014
Article Number 105
Number of page(s) 5
Published online 22 September 2014
  1. H. Ramakrishnan et al., Analysing the effect of process variation to reduce parametric yield loss, IEEE International Conference on Integrated Circuit Design and Technology and Tutorial, ICICDT. Austin, TX, USA, 2008 [Google Scholar]
  2. P. Sung-Woo et al., Microelectron. Eng. 66, 488–495 (2003) [CrossRef] [Google Scholar]
  3. L. Hsin-Te, S. Jie-Ren, Y. Yung-Kuang, Int. J. Adv. Manufact. Technol. 38, 674–682 (2008) [CrossRef] [Google Scholar]
  4. Z.N. Mevawalla, G.S. May, M.W. Kiehlbauch, Neural networks for advanced process control, in Advanced Semiconductor Manufacturing Conference (ASMC), IEEE/SEMI, San Francisco, CA, USA, 2010 [Google Scholar]
  5. Y.H. Long, J.X. Zhang, Chin. J. Electron. 16, 69–72 (2007) [Google Scholar]
  6. K. Byungwhan, J.K. Bae, W.-S. Hong, J. Vac. Sci. Technol. A 23, 355–358 (2005) [CrossRef] [Google Scholar]
  7. D. Stokes, G.S. May, IEEE Trans. Semicond. Manufact. 13, 469–480 (2000) [CrossRef] [Google Scholar]
  8. S.J. Hong, G.S. May, P. Dong-Cheol, IEEE Trans. Semicond. Manufact. 16, 598–608 (2003) [CrossRef] [Google Scholar]
  9. K. Byungwhan et al., J. Appl. Phys. 105, 113302 (2009) [CrossRef] [Google Scholar]
  10. S.J. Hong, G.S. May, IEEE Trans. Semicond. Manufact. 17, 408–421 (2004) [CrossRef] [Google Scholar]
  11. B. Kim, D. Lee, K.H. Kwon, J. Appl. Phys. 96, 3612–3616 (2004) [CrossRef] [Google Scholar]
  12. B. Kim, K. Park, Microelectron. Eng. 77, 150–157 (2005) [CrossRef] [Google Scholar]
  13. D.F. Specht, IEEE Trans. Neural Networks 2, 568–576 (1991) [Google Scholar]

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