Table 6
Results of surface roughness measurements by AFM and stylus profilometry. The samples and locations of measurements are shown in Figure 1. The uncertainties have a 95 % confidence level (k = 2). No AFM results were available from the channel surfaces of sample 4, or from sample 5. No stylus profilometry results were available from the bonding surface of sample 2 − sample 4. These results were also communicated in reports and a data set of the MFMET project [31,32,34,35].
| AFM | Stylus profilometry | |||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Sample | Location | Sa (nm) | Ra (nm) | Rq (nm) | Rz (nm) | Rt (nm) | Rp (nm) | Rv (nm) | Rsk | Rku |
| 2 | Channel surface 1 | 0.60 ± 0.04 | 1.4 ± 0.2 | 1.7 ± 0.4 | 8 ± 2 | 12 ± 6 | 4 ± 1 | 4.0 ± 0.8 | –0.1 ± 0.6 | 4 ± 2 |
| Channel surface 2 | 0.60 ± 0.06 | 1.3 ± 0.6 | 1.6 ± 0.7 | 8 ± 3 | 10 ± 6 | 4 ± 2 | 4 ± 2 | –0.4 ± 0.7 | 3 ± 2 | |
| Bonding surface | 0.51 ± 0.04 | – | – | – | – | – | – | – | – | |
| 3 | Channel surface 1 | 0.56 ± 0.06 | 1.3 ± 0.2 | 1.6 ± 0.4 | 8 ± 2 | 11 ± 6 | 4 ± 2 | 4 ± 1 | –0.1 ± 0.8 | 4 ± 2 |
| Channel surface 2 | 0.56 ± 0.02 | 1.3 ± 0.6 | 1.7 ± 0.7 | 8 ± 4 | 12 ± 6 | 4 ± 2 | 4 ± 2 | –0.2 ± 0.6 | 3 ± 2 | |
| Bonding surface | 0.49 ± 0.04 | – | – | – | – | – | – | – | – | |
| 4 | Channel surface 1 | – | 1.4 ± 0.3 | 1.8 ± 0.6 | 8 ± 2 | 13 ± 9 | 4 ± 1 | 4 ± 1 | 0 ± 1 | 5 ± 5 |
| Channel surface 2 | – | 1.5 ± 0.7 | 1.9 ± 0.9 | 9 ± 4 | 13 ± 9 | 4 ± 2 | 4 ± 2 | 0 ± 1 | 5 ± 5 | |
| Bonding surface | 0.46 ± 0.02 | – | – | – | – | – | – | – | – | |
| 5 | Bonding surface | – | 1.4 ± 0.4 | 1.8 ± 0.5 | 8 ± 2 | 11 ± 3 | 4 ± 1 | 4 ± 1 | –0.4 ± 0.4 | 3.3 ± 0.6 |
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