Test results from verifying the measuremenet accuracy and repeatability of 3D XRM dimensional data. The charts show deviations of XRM measurements, from CMM−calibrated/reference data, on the XRM-Check (different colored data points represent different test runs). All measurands used for the tests are listed in Table A.2 of Appendix A. The CMM reference measurements, from data provided by the Federal Institute of Metrology (METAS), has an expanded uncertainty of 0.14 μm [3].