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Fig. 7
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Set-up of the working standard.CDG10k: capacitance diaphragm gauges MKS type 690 with an effective full scale of 10 kPa; RSG: resonant silicon gauge Druck type DPI142 (3.5–130 kPa); P: vacuum pump; VM: isolation valve of the working standard; VRSG: isolation valve of the RSG; VP: isolation valve of the pump.
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