Ultra-high precision CMMs and their associated tactile or/and optical scanning probes

¹ Laboratoire Commun de Métrologie (LCM), LNE, 1 Rue Gaston Boissier, 75015 Paris, France
² VSL Dutch Metrology Institute, Thijsseweg 11, 2629JA Delft, The Netherlands
³ Federal Institute of Metrology (METAS), Lindenweg 50, 3003 Bern-Wabern, Switzerland
⁴ SMD, Federal Public Service Economy – Metrology – National Standards, Koning Albert II laan 16, 1000 Brussel, Belgium
⁵ TNO, Opto-mechatronics Department, Stieltjesweg 1, 2628 CK Delft, The Netherlands
⁶ IBS Precision Engineering bv, Bedrijfsweg 1, 5683 CM Best, The Netherlands

^⋆ Correspondence: hichem.nouira@lne.fr

Received: 25 February 2014
Accepted: 28 April 2014

Abstract

Optical and tactile single scanning probes usually are used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform assessments with nanometre level of accuracy, specific ultra-high precision machines have been developed by the National Metrology Institutes (NMIs) such as the LNE, VSL, METAS, SMD, generally in collaboration with industrials and academics partners. Such developments are not devoted only to NMIs but many industrials develop and commercialize their own ultra-high precision machines as the IBSPE and TNO companies. All these machines provide optical and tactile precise measurements and cover a large domain of application such as the form’s characterization of optical lenses. In this paper the performance and capability of ultra-high precision machines of some National Metrology Institutes (LNE, VSL, SMD and METAS) and industrials companies (TNO and IBSPE), involving together in the IND10 European EMRP project titled “Optical and tactile metrology for absolute form characterization”, will be detailed. Theirs probing systems and accuracies levels will be evoked. Relevant results especially for measuring optical lenses will be also presented and discussed.