Open Access
Table 2
Specifications of gear dynamics machine.
| Error items | References | Error | Uncertainty |
|---|---|---|---|
| Input axis radial runout | 3 µm | 2.3 µm | 1.63 µm |
| Output axis radial runout | 3 µm | 2.8 µm | 1.98 µm |
| Input axis axial runout | 3 µm | 2.2 µm | 0.11 µm |
| Output axis axial runout | 3 µm | 2.5 µm | 0.13 µm |
| Input axis eccentricity | 3 µm | 1.8 µm | 1.23 µm |
| Output axis eccentricity | 3 µm | 2.3 µm | 1.67 µm |
| Accuracy of circular grating | 3.2″ | 3.2″ | 0.89 µm |
| Accuracy of circular grating | 3.2″ | 3.2″ | 0.89 µm |
| Sub-division | 1.62″ | 1.62″ | 0.08 µm |
| Electrical system stability | 0.5″ | 0.35″ | 0.25 µm |
| Algorithm error | 0.005 µm | 0.005 µm | 0.003 µm |
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