Open Access

Table 8

Example 5. FAC-1; measurement system C; linearity study.

Consensus Standard Ref. value (nm) Rcon(1) 502 Rcon(2) 1012 Rcon(3) 1509 Rcon(4) 2262 Rcon(5) 3015
Uncertainty (nm) 4 5 5 6 6
  1 500 10080 15050 22570 30110
  2 497 10110 15020 22550 30080
T 3 500 10090 15060 22580 30130
R 4 496 10100 15050 22600 30110
I 5 497 10060 15040 22590 30120
A 6 495 10060 15080 22560 30150
L 7 496 10100 15030 22560 30140
S 8 500 10070 15060 22570 30090
  9 499 10080 15070 22610 30120
  10 498 10050 15040 22580 30100

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