Open Access

Table 5

Example 4. FAC-1; measurement system A; Linearity study.

Consensus Standard Ref. value (nm) Rcon(1) 502 Rcon(2)1012 Rcon(3)1509 Rcon(4)2262 Rcon(5)3015
Uncertainty (nm) 4 5 5 6 6
  1 500 1011 1508 2261 3016
  2 502 1014 1510 2259 3013
T 3 501 1012 1509 2262 3018
R 4 503 1010 1512 2264 3016
I 5 498 1008 1507 2263 3012
A 6 501 1009 1510 2265 3014
L 7 502 1010 1506 2261 3016
S 8 504 1014 1509 2259 3014
  9 501 1011 1507 2263 3011
  10 502 1014 1510 2262 3012

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