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Table 2

Example 2. Consensus trials; k = 4 factories (FAC-1–FAC-4).

Factory site FAC-1 FAC-2 FAC-3 FAC-4
Measurement gage (profilometer) PFL-1 PFL-2 PFL-3 PFL-4
Gage calibration uncertainty Ug (nm) 1.0 1.0 1.5 1.5
  1 501 504 504 505
  2 500 503 500 504
  3 502 501 502 503
  4 503 503 503 502
T 5 502 500 502 503
  6 501 504 499 501
R 7 500 504 500 502
  8 499 502 504 503
I 9 502 504 500 500
  10 501 503 501 502
A 11 503 501 503 504
  12 501 502 500 503
L 13 503 504 503 500
  14 500 503 502 503
S 15 501 500 501 501
  16 500 501 502 504
  17 503 503 501 500
  18 502 504 503 501
Measurement unit = nm 19 498 502 500 503
  20 500 501 503 503
Trials mean per factory site (nm) {Rp(s), Eq. (13)} 501.1 502.5 501.7 502.4
Repeatability variance per site (nm2)
{Vp(s), Eq. (14)}
1.99 1.94 2.24 2.13
Expanded uncertainty per site (nm)
{U(s), Eq. (15)} ⁋⁑
2.60 2.59 3.46 3.45
Consensus reference value
{Eqs. (13) & (22)}
Rcon ± Ucon ≅ (502 ± 4) nm

⁋ Gage resolution ρ  = 0.5 nm.

⁑ Tcrit(α/2, m ̶ 1) = 2.09, (for α = 0.05, m = 20).

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