Variable data measurement systems analysis: advances in gage bias and linearity referencing and acceptability | International Journal of Metrology and Quality Engineering (IJMQE)

Open Access

This article has an erratum: [https://doi.org/10.1051/ijmqe/2021013]

Table 2

Example 2. Consensus trials; k = 4 factories (FAC-1–FAC-4).

Factory site ⤇		FAC-1	FAC-2	FAC-3	FAC-4
Measurement gage (profilometer) ⤇		PFL-1	PFL-2	PFL-3	PFL-4
Gage calibration uncertainty Ug (nm) ⤇		1.0	1.0	1.5	1.5
	1	501	504	504	505
	2	500	503	500	504
	3	502	501	502	503
	4	503	503	503	502
T	5	502	500	502	503
	6	501	504	499	501
R	7	500	504	500	502
	8	499	502	504	503
I	9	502	504	500	500
	10	501	503	501	502
A	11	503	501	503	504
	12	501	502	500	503
L	13	503	504	503	500
	14	500	503	502	503
S	15	501	500	501	501
	16	500	501	502	504
	17	503	503	501	500
	18	502	504	503	501
Measurement unit = nm	19	498	502	500	503
	20	500	501	503	503
Trials mean per factory site (nm) ⤇ {Rp(s), Eq. (13)}		501.1	502.5	501.7	502.4
Repeatability variance per site (nm²) ⤇ {Vp(s), Eq. (14)}		1.99	1.94	2.24	2.13
Expanded uncertainty per site (nm) ⤇ {U(s), Eq. (15)} ⁋⁑		2.60	2.59	3.46	3.45
Consensus reference value ⤇ {Eqs. (13) & (22)}		Rcon ± Ucon ≅ (502 ± 4) nm

⁋ Gage resolution ρ = 0.5 nm.

⁑ Tcrit(α/2, m ̶ 1) = 2.09, (for α = 0.05, m = 20).

Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.

Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.

Initial download of the metrics may take a while.