Table 12
Example 6. FAC-1; measurement system D; linearity study.
| Consensus Standard Ref. value (nm) ⤇ | Rcon(1) 502 | Rcon(2) 1012 | Rcon(3) 1509 | Rcon(4) 2262 | Rcon(5) 3015 | |
|---|---|---|---|---|---|---|
| Uncertainty (nm) ⤇ | 4 | 5 | 5 | 6 | 6 | |
| 1 | 500 | 10080 | 15050 | 22570 | 30110 | |
| 2 | 497 | 10040 | 15020 | 22550 | 30080 | |
| T | 3 | 494 | 10090 | 15060 | 22610 | 30130 |
| R | 4 | 496 | 10100 | 15050 | 22530 | 30110 |
| I | 5 | 495 | 10060 | 15040 | 22590 | 30120 |
| A | 6 | 499 | 10060 | 15020 | 22560 | 30090 |
| L | 7 | 497 | 10040 | 15030 | 22560 | 30140 |
| S | 8 | 494 | 10070 | 15000 | 22540 | 30090 |
| 9 | 498 | 10080 | 15010 | 22590 | 30120 | |
| 10 | 496 | 10050 | 15040 | 22580 | 30100 | |
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