Open Access

Table 12

Example 6. FAC-1; measurement system D; linearity study.

Consensus Standard Ref. value (nm) Rcon(1) 502 Rcon(2) 1012 Rcon(3) 1509 Rcon(4) 2262 Rcon(5) 3015
Uncertainty (nm) 4 5 5 6 6
  1 500 10080 15050 22570 30110
  2 497 10040 15020 22550 30080
T 3 494 10090 15060 22610 30130
R 4 496 10100 15050 22530 30110
I 5 495 10060 15040 22590 30120
A 6 499 10060 15020 22560 30090
L 7 497 10040 15030 22560 30140
S 8 494 10070 15000 22540 30090
  9 498 10080 15010 22590 30120
  10 496 10050 15040 22580 30100

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