Table 1
Example 1. Check standard trials (measurement unit = nm.).
| Thin film gage | Trial index (m) | Check standard | Traceable standard |
|---|---|---|---|
| T | 1 | 1004 | 3009 |
| R | 2 | 1007 | 3010 |
| I | 3 | 1005 | 3011 |
| A | 4 | 1003 | 3010 |
| L | 5 | 1005 | 3012 |
| S | 6 | 1004 | 3009 |
| 7 | 1005 | 3012 | |
| 8 | 1006 | 3010 | |
| 9 | 1007 | 3009 | |
| 10 | 1005 | 3011 | |
| Trials mean (nm) ⤇ | Rchk ≅ 1005 {Eq. (1)} | Rm ≅ 3010 {Eq. (7)} | |
| Repeatability ⤇ variance (nm2) | Vchk ≅ 1.66 {Eq. (4)} | Vt ≅ 1.34 {Eq. (9)} | |
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