Open Access

Table 1

Example 1. Check standard trials (measurement unit = nm.).

Thin film gage Trial index (m) Check standard Traceable standard
T 1 1004 3009
R 2 1007 3010
I 3 1005 3011
A 4 1003 3010
L 5 1005 3012
S 6 1004 3009
  7 1005 3012
  8 1006 3010
  9 1007 3009
  10 1005 3011
Trials mean (nm) Rchk ≅ 1005 {Eq. (1)} Rm ≅ 3010 {Eq. (7)}
Repeatability variance (nm2) Vchk ≅ 1.66 {Eq. (4)} Vt ≅ 1.34 {Eq. (9)}

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