International Journal of Metrology and Quality Engineering (IJMQE)

Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity

L.L. Ren, H.F. Gao, S.T. Gao, J.J. Liu and W. Zhang

Int. J. Metrol. Qual. Eng., 4 2 (2013) 81-86

Published online: 07 November 2013

DOI: 10.1051/ijmqe/2013040

L.L. Ren

H.F. Gao

S.T. Gao

J.J. Liu

W. Zhang

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