Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivityL.L. Ren, H.F. Gao, S.T. Gao, J.J. Liu and W. ZhangInt. J. Metrol. Qual. Eng., 4 2 (2013) 81-86DOI: https://doi.org/10.1051/ijmqe/2013040
