International Journal of Metrology and Quality Engineering (IJMQE)

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Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

I. Naeim and S. Khodier

Int. J. Metrol. Qual. Eng., 3 2 (2012) 97-100

Published online: 14 November 2012

DOI: 10.1051/ijmqe/2012013

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