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Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophone

Xiaoyong Zhang, Nixin Shen, Qingda Xu, Yu Pei, Yuqi Lian, Weidong Wang, Guojun Zhang and Wendong Zhang

Int. J. Metrol. Qual. Eng., 12 (2021) 4

DOI: https://doi.org/10.1051/ijmqe/2021002

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