Design and implementation of anulus-shaped ciliary structure for four-unit MEMS vector hydrophoneXiaoyong Zhang, Nixin Shen, Qingda Xu, Yu Pei, Yuqi Lian, Weidong Wang, Guojun Zhang and Wendong ZhangInt. J. Metrol. Qual. Eng., 12 (2021) 4DOI: https://doi.org/10.1051/ijmqe/2021002